Internal compiler errors are caused by either of the following:
A corrupted CUDA installation
An error internal to the CUDA compiler that a programmer can do nothing about, other than filing a bug report with NVIDIA
I would suggest checking these possibilities in the order indicated. A corrupted CUDA installation could also involve mixing files from multiple different versions of CUDA. If you believe this to be a compiler bug after performing due-diligence checks, consider filing a bug using the form linked from the registered developer website. You would want to attach the smallest buildable self-contained code that reproduces the issue.