Installing cuda 12.1 for ubuntu 20.04

I’ve been trying to install CUDA 12.1 on ubuntu 20.04

Firstly, I downloaded Runfile using following command:
$ wget wget https://developer.download.nvidia.com/compute/cuda/12.1.1/local_installers/cuda_12.1.1_530.30.02_linux.run

After,I typed following command.
$ sudo sh cuda_12.1.1_530.30.02_linux.run

Then something went wrong. The shell is saying: Extraction failed.
Ensure there is enough space in /tmp and that the installation package is not corrupt
Signal caught, cleaning up

If you know how to deal with this problem, could you please give me some advice? Thank you.