Error installing license server

After installing Java 64bit, seting path and java_home I have successfully installed nvidia llcense server.
But then the Service "FlexNet License Server - nvidia" is not avaiable.
In the log-file I find:

C:\NVIDIA\LicenseServer\server>flexnetls.bat -install
Error writing service configuration : Der Prozess kann nicht auf die Datei zugreifen, da sie von einem anderen Prozess verwendet wird.

Pre-install failed

Also trying to manually install it failes.

Starting manually is ok.

What could be the problem?

Windows Server 2019


Deaktivate TrendMicro VirusScan --> Successfully installed.